Scanning/Transmission Electron Microscopy (S/TEM) Equipment
Aberration Corrected Transmission Electron Microscope (AC-TEM)
Available Fall 2025
JEM-ARM300F2 (GRAND ARM™2 Atomic Resolution Analytical Microscope) equipped with a
Cold Field Emission electron Gun (Cold-FEG) which provides a smaller energy spread
from the electron source for 300 kV and 60 kV. At 300 kV, the STEM image resolution
with the standard probe conditions of a Cs-corrected can reach 53 pm. The system is
equipped with energy dispersive X-ray spectroscopy (EDS) with FHP2 objective lens
pole piece, it can provide higher X-ray detection efficiency (1.4sr) with sub-angstrom
resolution in EDS elemental maps. Next-generation Gatan imaging filter that enables
electron energy loss spectroscopy (EELS) and energy-filtered transmission electron
microscopy (EFTEM), The energy resolution of the Electron Energy-Loss Spectroscopy
(EELS) is up to 0.3 eV. The OBF (Optimum Bright Field) STEM has an advantage for low
dose imaging, such as beam sensitive materials including Metal Organic Frameworks
(MOFs) and Zeolites require a reduced electron dose while maintaining clear atomic
contrasts for the framework of light elements.