Center for Nanomagnetic Systems

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Device Fabrication

Materials Synthesis Device Fabrication Characterization Modeling

Contributing Departments

ECE Chemical Engineering Mechanical Engineering Physics Chemistry Materials Engineering

CNS Sponsors

NSF NIH Office of Naval Research INSIC Alliance for Nanohealth

Ion/Atom Beam Lithography

Atom Beam Lithography printing tool, including a vacuum exposure station, duoplasmatron ion/atom source, power supplies, and instrumentation.

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