Ion Beam Analysis
Rutherford Backscattering Spectroscopy (RBS)
# Composition determination
# Stoichiometry
# Thickness measurement of thin films
# Elements depth profiling
# Interface study
Nuclear Reaction Analysis (NRA)
# Light element analysis
# Light elements depth profiling
# Low background and high sensitivity
Elastic Recoil Detection (ERD)
# Light elements analysis
# Light elements depth profiling
# multi elements analysis
Particle (Proton) Induced X-ray Emission (PIXE)
# Multi elements analysis (20 - 30 elements)
# High sensitivity 1 ppm - 0.1 ppm
# Material science, Bio medicine, Environmental, Geology, Archeology, and Art
RBS Ion Channeling (RBS-C)
# Impurity lattice location
# Damage proofing
# Strain of multilayer epi-films
# Interface and Surface study