1.7 MV Tandem Accelerator

RF Ion Source for He ion beam and Sputtering Negative Ion Source for other types of ions.

Terminal voltage of 0.1-1.7 MV, proton energy beam of 0.2-3.4 MeV.

Heaviest Ion - Bi

Highest Energy tried - 16.5 MeV

Beam Current - 1 - 100 micro-amp

200 kV Ion Implanter

Terminal voltage of 0-200 kV

Type of ions - proton - Bi

Beam Current - 1 - 10 micro-amp

Gas Cluster Ion Beam System

Terminal voltage of 0-30 kV

Cluster ions ~ 1000 - 3000 atoms Ar

Beam Current - 100 nano-amp to 1 micro-amp