
Nacer Badi, Ph.D
Employment
history:
May.99- Present Research
Scientist, Physics, University of Houston
In charge of the
development of BN-CN-TiN-TaN materials for high power
& high temperature device, field emitter, and
tribological applications.
Feb.97- Apr.99
Research associate, University of Houston -
Space Vacuum Epitaxy Center
Involved in:
BN/CN/TiN nitride
materials development for tribology and high
temperature device applications using ECR and ion
sources assisted PVD technique;
PVD growth and
characterization of Nitride related Materials and
device fabrication. Modeling/simulation of
fundamental processes - proposals writing - play
an active role in the technical community by
reporting, publishing (more than 30 technical
papers, R&D results, etc.) - responsible for
supervision of one graduate student and one
undergraduate student for material growth and
characterization.
Sep. 94- Jan 97 Staff
researcher, University of Houston - Space Vacuum Epitaxy
Center
Performed research in
nitride growth and characterization of deposited
films; upgrading, trouble shooting and maintenance of
process equipment; writing publications, and Involved
in proposals
Education:
Ph.D. University of
Sidi Bel-Abbes/University of Houston 1996
Physics
M.S. University of Sidi Bel-Abbes
- 1992 Microelectronics
EE. University of Science and
Technology of Oran 1989 Electronics
Research
Activities/Interest:
Materials Science
of Thin Films: achievement of
BN/CN thin films -based cold cathode applications;
achievement of BN/CN/TiN materials films with excellent
tribological properties; demonstration of high
temperature boron nitride diode and different MIS
structures based BN/GaN and BN/SiC materials; report for
the first time a local pulsed UV laser annealing of CN
films; report for the first time the use of a novel
multiphoton laser excitation technique to obtain higher
photoconductivity (PC) signal BN wide band gap materials;
feasibility study and deposition of single and multi-capacitor
based on BN/TiN,TaN,Al,Pt,Ti,Cu materials for high energy
storage-high frequency-high temperature needs. Modeling
and Simulation: report for the first time,
the major chemical trends in the deep-energy levels of
isolated sp3-bonded substitutional native
defects in boron nitride; proposition of a model based on
experimental results suggesting nitrogen vacancies for n-type
and boron antisite or impurities for p-type BN films;
study the electronic band structure, charge density,
density of states of most binary and ternary
semiconductor alloys subjected to external parameters (i.e.
pressure, temperature)
Interest:
multilayer ceramic capacitor/actuators chips MLC3s,
electron field emitters based nitride materials;
modeling, fabrication technologies and applications of
semiconductor devices; MEMS devices based nitride
materials; new class of hard coating materials for
advanced tribological applications.
Selected
publications: (out of a total of 50 publications/presentations):
" X-ray
induced modification of BN thin films electronic
properties". V. Ageev, M. Ugarov, V.
Frolov, A. Karabutov, E. Loubnin, N. Badi and A.
Bensaoula, JAP- AIP ID 073024, 2000 (in press).
"Laser-Induced
Modifications of Carbon Nitride Films", N.
Badi, D. Starikov, A. Bensaoula, V. Ageev, A.
Karabutov, M. Ugarov, and E. Loubnin , JAP- AIP
ID 036021, 2000 (in press).
"Etch
Characteristics of GaN and BN Materials in
Chlorine-Based Plasmas", N. Medelci, A.
Tempez, D. Starikov, N. Badi, I. Berishev, and A.
Bensaoula, Journal of Electronic Materials 29,
1079 (2000).
"Boron
Nitride-based Multilayer Ceramic Capacitor Chips
(MLC3s) for High Temperature Applications" N.
Badi, D. Starikov, and A. Bensaoula, JEM 2000 (submitted)
"Field
Emission from as-grown and Surface Modified BN
and CN Thin Films" N. Badi, A. Tempez, D.
Starikov, A. Bensaoula, V.P.Ageev, A. Karabutov,
M.V. Ugarov, V. Frolov, E. Loubnin, K. Waters and
A. Shultz, J. Vac. Soc.Technol. A 17, 1191 (1999).
"Enhanced
free carrier generation in boron nitride films by
pulsed laser radiation" V. Ageev, S.
Klimentov, M. Ugarov, E. Loubnin, A. Bensaoula, N.
Badi, A. Tempez, and D. Starikov, App. Surf. Sci.
138-139, 364-369 (1999).
"Surface
composition of BN, CN, and BCN thin films" A.
Tempez, N. Badi, J. Kulik, and A. Bensaoula, J.
Vac. Soc.Technol. A 16, 2896 (1998)
"Boron
carbon nitride materials for tribological and
high temperature device applications" N.
Badi, A. Tempez, D. Starikov, V. Zomorrodian, N.
Medelci, A. Bensaoula, J. Kulik, S. Lee, S. S.
Perry, V. P. Ageev, S. V. Garnov, M. V. Ugarov, S.
M. Klimentov, V. N. Tokarev, K.Walters, and A.Schultz,
, Space Technology and Applications
International Forum, Albuquerque, New Mexico,
AIP, p 666 (1998).
Patent:
"Boron Nitride based Multilayer Ceramic
Capacitors Chips (MLC3s) for High-Energy Density Storage
and Method of Manufacture thereof" (under process).
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resume]
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