:: Curriculum Vitae ::
:: Abdelhak Bensaoula :: ADDRESS #724, S&R1, SVEC, University of Houston Houston, Texas, 77204-5507 TEL (713)-743-3621 FAX (713)-747-7724 Email: Bens@Jetson.uh.edu
EDUCATION Ph.D. University of Houston 1990 Physics M.S. University of Houston 1982 Control Systems D.E.S University of Oran 1978 Physics
PROFESSIONAL EXPERIENCE
2000- Present Research Professor,
1992- 2000 Research Associate
Professor, University of Houston 1990-1992 Research Assistant Professor,
University of Houston Space Vacuum Epitaxy Center 1988-1999 Senior Research scientist,
University of Houston Space Vacuum Epitaxy Center 1986-1988 Research Scientist, University
of Houston Space Vacuum Epitaxy Center
RESEARCH ACHIEVEMENTS SUMMARY
(1995- 1998) Project Leader of the
Nitride Materials and Devices Laboratory Developed a Multi-faceted Nitride Materials
program at the Space Vacuum Epitaxy Center: 1: Developed MBE, GS-MBE, and CBE Growth
capabilities (externally funded) 2: Demonstrated high GaN growth rate by
a Modified ECR source 3: Demonstrated in-situ time of flight
ion scattering for thin film surface composition and structure determination 3: Demonstrated enhanced field emission
properties from various nitride materials 4: Demonstrated nitride based junction
devices operating at above 600 C 5: Demonstrated pre-breakdown luminescence
devices using BN/GaN 6: Demonstrated RIE and photo-enhanced
RIE of BN and III-Nitride materials
(1992 –1995) Initiated a program for high efficiency
Photovoltaic research using chemical beam epitaxy. This program is continuing
under Professor Alex Freundlich.
(1992- 1995) Set up the molecular beam and chemical
beam epitaxy facilities at SVEC. Developed a reactor for MBE deposition
of high temperature superconductors. Initiated the first pulsed laser
deposition effort of the high Tc materials at the University of Houston.
MEMBERSHIP in PROFESSIONEL and HONOR
SOCIETIES
AVS, IEEE, Sigma Xi
PROFESSIONEL ACTIVITIES
Member of the Editorial Board of the "
Microelectronics Journal" Member of the Advisory board of the "Algerian
Journal of Advanced Materials"
Patents:
1: Tandem Solar Cell with Improved Tunnel
Junction (patent # 5,407,491) 2: Strained quantum well photovoltaic
energy conventional (patent # 5,851,310) 3: Tandem solar cell with indium phosphide
tunnel junction (patent # 5,800,630) 4: A microelectromechanical machined array
valve (5,927,325) 5: Real Time Etch Rate Determination and
Enhanced Etch End Point Detection Using Isotopically Engineered Materials
(6,054,333).
Students’ and Postdoctoral Supervision:
1992-2000 trained over 18 undergraduate
students 1994 graduated two MS students (physics); 1996 graduated one Ph.D. student (physics) 1997 graduated one Ph.D. Student (physics);
1998 graduated one Ph.D. and one M.S.
Students (Chemistry Department) Currently: Two Ph.D. Students (Chemistry
department) Advised a total of 8 post doctoral fellows,
FUNDING:
1993 The State of Texas Advanced Research Program;
Low Energy Neutral Beam Etching of III-V compounds", $ 245,000
(01/1994-01/1996). Industry funding, Ionwerks, Inc.; "
Ion beam scattering experiments on III-N thin films"; $73,000 (06/1993-12/1993).
1994 Office of Naval Research equipment grant,
" Development of a Low Energy Neutral Beam Source"; $ 145,000
(01/1994-12/1994). Industry funding, Ionwerks, Inc.; "Time
of Flight Ion Scattering for Real time monitoring of III-V compounds
growth"; $ 47,000 (04/114-11/1994).
1997 Civilian Research Development Funds; "BN
and CN thin Films for Field Emission Applications"; $39,000 (01/1997-01/1998). Industrial funding; Ionwerks, Inc.; "
Time of Flight Ion Scattering of III-N Compounds"; $ 94,000 (01/1997-12/1997). Energy Laboratory at the University of
Houston; " UV-Blue Emitters for Chemical Sensing Applications";
$ 16,000 (04/1997-10/1997).
1998 State of Texas Advanced Technology Program;
" Real Time Surface Composition Monitoring of Thin Films Using
Ion Scattering Techniques"; $ 270,000 (01/1998-01/2000). Civilian Research Development Funds; "
Laser Modification of CN/BN thin Films for Electron Field Emission Applications";
$ 12,000 (01/1998-12/1998). Industrial support, Ionwerks, Inc.; "
A Miniature Time of Flight Mass Spectrometer for Process Control and
Monitoring of Thin Film Processes"; $ 170,000 (01/1998-08/1999). Energy laboratory at the university of
Houston; " A neural network controller for thin film process control
optimization"; $ 5,500 (05/1998-08/1998).
1999 Environmental Institute of Houston; "GaN-based
Chemical Sensors"; $ 12,000 (6 months; 01/99-08/99) Ballistic Missile Defense Organization,
Phase I STTR contract; "Development of BN-based
multi layer capacitors for high power and high frequency applications";
$ 34,000 (6 months; 04/99-10/99) Industrial Support (Ionwerks, Houston
Texas); Testing of a Time of flight mass spectrometer in an RIE environment;
$ 65,000 (1 year, 10/98-10/99) Institute for Space Systems Operations; Post Doctoral
support for two years "Miniature Optical Sensor for Detection of Water
and Air Contamination" $ 40,000.00 (2 years; 01/2000-12/2001) Department of Energy SBIR; "BN/CuLi Particle detectors";
$34,000 for 6 months ( 09/1999-02/2000). Texas Space Grant Consortium; "Chemical Sensors for
environmental control of enclosed Space platforms", $ 50 K for
one year (09/1999-09/2000). 2000 Texas Space Grant Consortium; Continuation of "Chemical
Sensors for environmental control of enclosed Space platforms",
$ 50 K for one year (09/2000-09/2001). Institute for Space Systems Operations; "Miniature
Optical Sensor for Detection of Water and Air Contamination"; $
13,000.00 ( 06/2000-09/2000). National Institute of Health; " AlGaN particle detectors
for bio mass spectrometry applications"; $36,000 (04/2000-09/2000). DURIP-Army Research Office; "Time of Flight Mass
Spectroscopy of Recoiled Ions for Real-time III-N Thin films Monitoring",
$ 165 K (05/2000-05/2001). Pending Proposals National Science Fundation Goali program; " AlGaN
Particle Detectors for Low Energy/High Mass Applications"; $ 650K
(01/2001-12/2003)
Book Chapters: Invited to write a book chapter in nitride
materials research for the "handbook of Advanced Electronic and
Photonic Materials" by Academic Press. The title is: "Synthesis
of Nitride Materials for Tribilogical, High Temperature and Opto-Electronic
Devices" (due June 1999).
Invited talks (1996-1999)
" In-Situ Monitoring and Control
of III-Nitrides Thin Films Surface Composition by Time of Flight Low
Energy Ion Scattering", A. Bensaoula, E. Kim, I. Berishev; MRS
Spring Meeting 1999. "Investigation of BN, CN, and BCN Thin
Films for Tribology, Electronic, and Optical Applications"; A. Bensaoula
et al;; Second International Conference on Advanced Materials; Sidi
Bel Abbes, Algeria (1997). "The Growth of Semiconductor Thin
Films Using The Ultra high Vacuum of Space", Second International
Conference in In-Situ Thin Film Monitoring" San Luis Potosis, Mexico
1996.
Selected Reviewed Publications (out
of 98 reviewed publications total) "Stress analysis in strain compensated
arsenide/phosphide superlattices grown by chemical beam epitaxy. Part
1"; A. H.Bensaoula, I. Ruzakova, and A. Bensaoula, Microelectronics
Journal 31(2000) 311-322. "Stress analysis in strain compensated
arsenide/phosphide superlattices grown by chemical beam epitaxy. Part
2"; A. H.Bensaoula, I. Ruzakova, and A. Bensaoula, Microelectronics
Journal 31(2000) 323-331. "In situ surface composition and structure of InGaN
and GaN thin films by time-of-flight mass spectroscopy of recoiled ions";
E. Kim, I. Berishev, and A. Bensaoula; and J. A. Schultz J. Vac. Sci.
Technol.B;Vol.17 (3), pp. 1209-1213 (1999). "Photoenhanced reactive ion etching of III–V nitrides
in BCl3/Cl2/Ar/N2 plasmas"; A. Tempez, N. Medelci, N. Badi, I.
Berishev, D. Starikov, and A. Bensaoula; J. Vac. Sci. Technol. A; Vol.17
(4), pp. 2209-2213 (1999). "Mg doping studies of electron cyclotron resonance
molecular beam epitaxy of GaN thin films"; I. Berishev, E. Kim,
A. Fartassi, M. Sayhi, and A. Bensaoula; J. Vac. Sci. Technol. A, Vol.
17 (4), pp. 2166-2169 (1999). "Metal–insulator–semiconductor Schottky barrier structures
fabricated using interfacial BN layers grown on GaN and SiC for optoelectronic
device applications"; D. Starikov, N. Badi, I. Berishev, N. Medelci,
O. Kameli, M. Sayhi, V. Zomorrodian, and A. Bensaoula; J. Vac. Sci.
Technol. A, Vol.17(4), pp. 1235-1238 (1999). "Field emission from as-grown and surface modified
BN and CN thin films"; N. Badi, A. Tempez, D. Starikov, and A.
Bensaoula; and V. P. Ageev, A. Karabutov, M. V. Ugarov, V. Frolov, and
E. Loubnin; and K. Waters and A. Shultz; J. Vac. Sci. Technol A, Vol.17(4),pp.
1191-1195 (1999). "Laser-induced modification of electron
field emission from nanocrystalline diamond films"; M. V. Ugarov,
V. P. Ageev, A. V. Karabutov, E. N. Loubnin, S. M. Pimenov, and V. I.
Konov; and A. Bensaoula; J. Applied Physics, Vol.85(12), pp. 8436-8440
(1999). "Time of Flight Mass Spectroscopy
of Recoiled Ions Studies of Surface Kinetic and Growth Peculiarities
during Gas Source Molecular Beam Epitaxy of GaN"; E. Kim, I. Berishev,
A. Bensaoula,. J.of Appl. Physics., Vol. 85, No.2, 1178-1185 (1999). "UV laser induced interfacial synthesis
of CN-BCN layers on diamond films in borazine and ammonia"; M.
V. Ugarov, V. P. Ageev, A. V. Karabutov, E. N. Loubnin, S. M. Pimenov,
V. I. Konov, and A. Bensaoula; Applied Surface Science, 138-139, 359-363
(1999). "Enhanced free carrier generation
in boron nitride films by pulsed laser radiation"; V. Ageev, S.
Klimentov, M. Ugarov, E. Loubnin, A. Bensaoula, N. Badi, A.Tempez, and
D.Starikov; Applied Surface Science, 138-139, 364-369 (1999). "The Use of Multilayer Neural Networks
in Material Synthesis"; Abdelhak Bensaoula, Heidar A. Malki, and
A. Marcellino Kwari; IEEE Transac. Semi. Manufac., Vol. 11, p. 421,
No. 3, August 1998. "Field emission properties of GaN
films on Si(111)"; I.Berishev, A.Bensaoula, I.Rusakova, V.Ageev,
M.Ugarov, A. Karabutov; Appl.Phys. Lett. Volume 73, Issue 13, pp. 1808-1810(1998). "High Growth Rate GaN Films Using a Modified
Electron Cyclotron Resonance Plasma Source", I.Berishev, E.Kim, A.Bensaoula, J. Vac.
Sci. Technoll. A, Vol. 16 (5), pp. 2791-2793 (1998). "Time of Flight Mass Spectroscopy
of Recoiled Ions Studies of Gallium Nitride Thin Film Deposition by
Various Molecular Beam Epitaxial Methods", E. Kim, I. Berishev,
and A. Bensaoula, MRS Internet J. Nitride Semicond. Res. 3, 22 (1998). "Surface composition of BN, CN, and
BCN thin films"; A. Tempez, N. Badi, J. Kulik, and A. Bensaoula,
J. Vac. Sci.Technol. A 16, 2896 (1998) "Surface Composition and Morphology
of Chemical Beam Epitaxy Grown GaN thin Films"; Esther Kim, I.Berishev,
A.Bensaoula, S.Lee, S.S.Perry, K.Waters, A.Shultz; J.Vac. Sci. Technol.
B, 16(3), 1270(1998). "Nucleation and Growth of Chemical
Beam Epitaxy Gallium Nitride Thin Films"; Esther Kim, I.Berishev,
A.Bensaoula, S.Lee, S.S.Perry, K.Waters, A.Shultz; Appl. Phys. Lett.,
71(21), 3072(1997). "Dynamical Charge and Force Constant
Calculations in c-BN under Pressure", N. Badi, A. Bousetta,
A. Bensaoula, and H. Aourag; Phys.Stat.Sol.(b) 198, 721 (1996). "Electrical Properties of Boron Nitride
Thin Films Grown by Neutralized Nitrogen ion Assisted Vapor Deposition";
Ming. Lu, A. Bousetta, and A. Bensaoula; Appl. Phys. Lett. 68 (5), p
622 (1996). "Investigation of GaN deposition
on Si, Al2O3, and GaAs using in Situ mass spectroscopy of recoiled ions
and reflection high energy electron diffraction"; W.T. Tafferner,
A. Bensaoula, E. Kim, and A. Bousetta; J. Vac. Sci. Technol. B 14(3),
1996. "The Investigation of GaN growth
on Silicon and sapphire using in-situ time of flight low energy ion
scattering and RHEED"; W.T. Tafferner, A. Bensaoula, E. Kim, and
A. Bousetta; J. Cryst. Growth 164, 167, 1996. "The Nitridation of GaAs and GaN
deposition on GaAs examined by in-situ time of flight ion scattering
and RHEED"; A. Bensaoula, W. T. Tafferner, E. Kim, A. Bousetta,
J. Cryst. Growth 164, 185, 1996. "Formation of Carbon Nitride Films on
Si(100) Substrates by Electron Cyclotron Resonance Plasma Assisted Vapor
Deposition"; A. Bousetta, M. Lu, and A. Bensaoula, A. Schultz; Appl.
Phys. Lett. 65(6), p 696-698 (1994). "Physical Properties of Thin Carbon Nitride
Films Deposited by Electron Cyclotron Resonance Assisted Vapor Deposition";
A. Bousetta, M. Lu, and A. Bensaoula; J. Vac. Sci. Technol. A13(3),
p.1639-1643 (1995). "Electrical Properties of Boron Nitride
Thin Films Grown By Neutralized Nitrogen Ion Asssisted Vapor Deposition";
Ming Lu, A. Bousetta, and A. Bensaoula; Appl. Phys. Lett. 68 (5), p.
622-624, (1996). " The Reaction of Ammonia on GaN Surfaces";
S. Gates, C..M. Chang, A. Bensaoula, and A. Schultz; Chem. Phys. Let.,
246, 275 (1995). "Surface effects during proximity
rapid thermal diffusion of phosphorous in silicon", S. Montadon,
W. Zagozdzon-Wosik, J. Li, W. T. Taferner, and A. Bensaoula in
"Cleaning Technology in Semiconductor Device Manufacturing
IV", edited by J. Ruzyllo and E. Nowak, Proc. of the 4th
International Symposium on Cleaning Technology in Semiconductor Device
Manufacturing IV, The Electrochem. Soc. Inc., Pennigton, NJ, pp. 552-559,
Vol 95-20 (1995). "The growth of cubic boron nitride on
Si(100) by neutralized ion beam bombardment" M.Lu, A.Bousetta, R.Sukach,
A.Bensaoula, K.Walters, and A.Schultz , Appl.Phys.Lett.64, 151, 1994;
"ECR plasma assisted growth of thin carbon nitride films on Si(100)"
A. Bousetta, A. Bensaoula, M. Lu, and J. A. Schultz, Appl. Phys. Lett,
65 (1994) "Effects of ion beam and electron cyclotron
resonance etch-induced damage on the optical properties of multi quantum
well structures", A.H. Bensaoula, A. Bensaoula, and A. Freundlich, J.
Appl. Phys. 75, 2818 (1994). "In-Situ Doping and Composition Monitoring
for Molecular Beam Epitaxy Using Mass Spectroscopy of Recoiled
Ions", K. Waters, A. Bensaoula, A. Schultz, K. Eipers-Smith, and A.
Freundlich, J. Crys. Growth 127 (1993) 972-975. "Interface and relaxation properties
of chemical beam epitaxy grown GaP/GaAs structures", A. Freundlich, A. Bensaoula, A. H. Bensaoula,
and V. Rossignol, J. Vac. Sci. Technol. B 11(3), 851 (1993). "Chemical Beam Epitaxy and Structural
Analysis of InAs/InP Strained Single and Multi Quantum Well Heterostructures",
A. Bensaoula, A. Freundlich, A.H. Bensaoula, J. Vac. Sci. Technol. B
11(3), 851 (1993) "Low Temperature Organometallic Gas
Introduction System for Chemical Beam Epitaxy Under Micro-Gravity Conditions",
M. Zaltsberg, A. Bensaoula, C. Horton, R. Haacke, A. Freundlich, P.
Mahavadi, and V. Rossignol, J. Vac. Sci. Technol. A, 11.4, 1993, 1602-06. "Chemical Beam epitaxy and Structural
Analysis of InAs/InP Strained Single and Multi Quantum Well Heterostructures",
A. Freundlich, A.H. Bensaoula, and A. Bensaoula, J. Crys. Growth, 127,
246 (1993). "The temperature dependent variation of
bulk and surface composition of InxGa1-xAs on GaAs grown by chemical
beam epitaxy studied by RHEED, X-ray diffraction and XPS", H.S.Hansen,
A.Bensaoula, S. Tougaard, J. Crys Growth 116 (1992) 271-282. "Anisotropy in InGaAs/GaAs Heterostructures
Grown by Low-Pressure MOVPE and CBE", A.P.Roth, D. Morris, Q. Sun, C.
Lacelle, Z. Wasilewski, P. Maigne, and A. Bensaoula, J. Cryst. Growth
120 (1992): 212-17. "A Study of Y-BA-Cu-O/Si Interfaces by
X-ray Photoelectron Spectroscopy", A.R. Chourasia and D.R.Chopra; A.H.
Bensaoula, A. Bensaoula, and P. Ruzakowski, J. Vac. Sci. Technol., A10,
115 (1992). "Rate Equation Models of Epitaxial Growth
on Stepped Surfaces", J.Resh, J. Strozier, A. Bensaoula, A. Ignatiev,
J. Vac. Sci. Technol., A9(3) (1991). "Interesting Aspects of RHEED Oscillations
During MBE Growth of GaAs (100)", K.D.Jamison, J.S.Resh, C.C.Horton,
A. Bensaoula, and A. Ignatiev, J.Vac.Sci.Tech., B8(2), p.279, 1990. "A RHEED and XPS Study of InGaAs on GaAs
Grown by CBE; A. Bensaoula, H. Hansen, H. C. Chen, J. Zborowski, K.
Jamison, A. Ignatiev and H.D. Shih, J. Crystal Growth 105, 227
(1990).
CONFERENCE PRESENTATIONS SINCE OCTOBER
1997
21."Employment of Boron Nitride Insulating
Layers for High Temperature Diode Structures Based on Wide Band Gaps Semiconductors Materials",
D. Starikov, N. Badi, I. Berichev, N. Medelci,
Devices Conference, February 1998, San
Diego, CA.
|